The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Jan. 22, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Masahiko Kubota, Tokyo, JP;
Ken Tsuchii, Sagamihara, JP;
Masataka Sakurai, Kawasaki, JP;
Yoshiyuki Nakagawa, Kawasaki, JP;
Akiko Saito, Tokyo, JP;
Shinji Kishikawa, Tokyo, JP;
Ryoji Kanri, Zushi, JP;
Atsunori Terasaki, Kawasaki, JP;
Akihiko Okano, Fujisawa, JP;
Atsushi Hiramoto, Machida, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A method of manufacturing a liquid ejection head includes the steps of (1) forming a recess in a second surface of a substrate to form a common supply port, (2) forming an etching mask, which specifies opening positions of independent supply ports, on a bottom surface of the common supply port, and (3) performing ion etching using plasma with the etching mask employed as a mask, thereby forming the independent supply ports. The etching mask has an opening pattern formed therein such that respective distances from an ejection energy generation element to openings of two independent supply ports adjacent to the ejection energy generation element on the first surface side of the substrate are equal to each other.