The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2015

Filed:

Jul. 10, 2014
Applicant:

Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;

Inventors:

Takanobu Miyashita, Tsukuba, JP;

Yasuyuki Goto, Tsukuba, JP;

Takamichi Yamamoto, Tsukuba, JP;

Ryousuke Kushibiki, Tsukuba, JP;

Masahiro Aono, Tsukuba, JP;

Masahiro Nishiura, Tsukuba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); B22F 3/12 (2006.01); B22F 9/08 (2006.01); C22C 1/05 (2006.01); C22C 5/04 (2006.01); C22C 32/00 (2006.01); G11B 5/851 (2006.01); B22F 9/04 (2006.01); C22C 1/04 (2006.01); C22C 1/10 (2006.01); H01J 37/34 (2006.01); C23C 14/06 (2006.01); C22C 38/00 (2006.01); C22C 38/16 (2006.01);
U.S. Cl.
CPC ...
B22F 3/12 (2013.01); B22F 9/04 (2013.01); B22F 9/08 (2013.01); C22C 1/0466 (2013.01); C22C 1/05 (2013.01); C22C 1/10 (2013.01); C22C 5/04 (2013.01); C22C 32/00 (2013.01); C23C 14/0635 (2013.01); C23C 14/34 (2013.01); C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01J 37/3429 (2013.01); B22F 9/082 (2013.01); B22F 2201/03 (2013.01); B22F 2999/00 (2013.01); C22C 38/002 (2013.01); C22C 38/16 (2013.01); H01J 37/3491 (2013.01); H01J 2237/3322 (2013.01); H01J 2237/3323 (2013.01);
Abstract

An FePt-based sputtering target has a structure in which an FePt-based alloy phase, a C phase containing unavoidable impurities, and a metal oxide phase containing unavoidable impurities are mutually dispersed, the FePt-based alloy phase containing Pt in an amount of 40 at % or more and 60 at % or less with the balance being Fe and unavoidable impurities, wherein C is contained in an amount of more than 0 vol % and 20 vol % or less based on the total amount of the target, the metal oxide is contained in an amount of 10 vol % or more and less than 40 vol % based on the total amount of the target, and the total content of C and the metal oxide is 20 vol % or more and 40 vol % or less based on the total amount of the target.


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