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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9093975 B1

PDFFull Text
Date of Patent:
Jul. 28, 2015

Filed:

Aug. 19, 2013

Microelectromechanical systems comprising differential inductors and methods for making the same

Applicant:

Harris Corporation, Melbourne, FL (US);

Inventor:

John E. Rogers, Gainesville, FL (US);

Assignee:

Harris Corporation, Melbourne, FL (US);

Attorneys:

Robert J. Sacco, Esq.

Fox Rothschild LLP

Primary Examiner:

Adam Houston

Int. Cl.
CPC ...
H03H 7/01 (2006.01); H03H 1/02 (2006.01); H03H 3/00 (2006.01); H01F 17/00 (2006.01); H01L 23/522 (2006.01); H01L 23/66 (2006.01); H03H 7/00 (2006.01);
U.S. Cl.
CPC ...
H03H 1/02 (2013.01); H01F 17/0006 (2013.01); H01L 23/5227 (2013.01); H01L 23/66 (2013.01); H03H 3/00 (2013.01); H03H 7/0115 (2013.01); H03H 2007/006 (2013.01);
Abstract

An integrated Microelectromechanical Systems ('MEMS') device (). The MEMS device comprises a substrate (), a transition portion (), and a differential inductor (). The transition portion is connected to and at least partially extends transversely away from a major surface of the substrate. The differential inductor is mechanically suspended above a major surface of the substrate at least partially by the transition portion. The differential inductor is also electrically connected to an electronic circuit external thereto by the transition portion. A first dielectric gap exists between the major surface of the substrate and the differential inductor.

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Quick Actions:

Rogers, John. (2015). Microelectromechanical systems comprising differential inductors and methods for making the same (U.S. Patent No. 9093975). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9093975

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