The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

Jan. 24, 2013
Applicants:

Zhong L. Wang, Atlanta, GA (US);

Caofeng Pan, Atlanta, GA (US);

Inventors:

Zhong L. Wang, Atlanta, GA (US);

Caofeng Pan, Atlanta, GA (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 27/15 (2006.01); H01L 21/77 (2006.01); B82Y 10/00 (2011.01); B82Y 15/00 (2011.01); B82Y 20/00 (2011.01); H01L 29/872 (2006.01); H01L 29/06 (2006.01); H01L 41/113 (2006.01); H01L 29/41 (2006.01); H01L 33/00 (2010.01); H01L 33/18 (2010.01); G01L 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/153 (2013.01); B82Y 10/00 (2013.01); B82Y 15/00 (2013.01); B82Y 20/00 (2013.01); G01L 1/005 (2013.01); H01L 21/77 (2013.01); H01L 29/0673 (2013.01); H01L 29/0676 (2013.01); H01L 29/413 (2013.01); H01L 29/84 (2013.01); H01L 29/872 (2013.01); H01L 33/0008 (2013.01); H01L 33/18 (2013.01); H01L 41/1132 (2013.01);
Abstract

A pressure sensor element includes a substrate, a first type of semiconductor material layer and an array of elongated light-emitting piezoelectric nanostructures extending upwardly from the first type of semiconductor material layer. A p-n junction is formed between each nanostructure and the first type semiconductor layer. An insulative resilient medium layer is infused around each of the elongated light-emitting piezoelectric nanostructures. A transparent planar electrode, disposed on the resilient medium layer, is electrically coupled to the top of each nanostructure. A voltage source is coupled to the first type of semiconductor material layer and the transparent planar electrode and applies a biasing voltage across each of the nanostructures. Each nanostructure emits light in an intensity that is proportional to an amount of compressive strain applied thereto.


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