The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Mar. 14, 2014
Applicant:
Yuanchang Zhang, Columbus, OH (US);
Inventor:
Yuanchang Zhang, Columbus, OH (US);
Assignee:
NATCORE TECHNOLOGY, INC., Red Bank, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 21/02 (2006.01); C23C 18/06 (2006.01); C23C 18/12 (2006.01); H01L 31/0216 (2014.01); H01L 31/068 (2012.01); C25D 5/02 (2006.01); C25D 17/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02282 (2013.01); C23C 18/06 (2013.01); C23C 18/125 (2013.01); C23C 18/1212 (2013.01); C23C 18/1216 (2013.01); C23C 18/1245 (2013.01); C23C 18/1254 (2013.01); C25D 5/02 (2013.01); C25D 17/06 (2013.01); H01L 31/02167 (2013.01); H01L 31/02168 (2013.01); H01L 31/068 (2013.01); Y02E 10/547 (2013.01);
Abstract
A deposition process for coating a substrate with films of varying thickness on a substrate can be achieved. The thickness of the film deposition can be controlled by the separation between the substrate and a curtain. Different separation distances between the substrate and curtain in the same chemical bath will result in different film thicknesses depositing on the substrate.