The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Sep. 11, 2014
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventors:
Takashi Yamazaki, Kawasaki, JP;
Yasutoshi Kotaka, Sagamihara, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/244 (2006.01); G01N 23/04 (2006.01); G01N 13/12 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/28 (2013.01);
Abstract
A scanning transmission electron microscope system includes: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum.