The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
May. 20, 2011
Applicants:
Akinori Ohkubo, Utsunomiya, JP;
Yasuyuki Unno, Utsunomiya, JP;
Inventors:
Akinori Ohkubo, Utsunomiya, JP;
Yasuyuki Unno, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01M 11/02 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0257 (2013.01); G01M 11/0221 (2013.01); G01M 11/02 (2013.01); G01M 11/0207 (2013.01); G01M 11/0235 (2013.01);
Abstract
An apparatus for measuring a wavefront of light traveling through test optics includes: a light source; a lenslet array where light from the light source travels through; a detector array configured to acquire a light intensity distribution through the lenslet array; and a processing unit, wherein the processing unit executes data processing with the acquired light intensity distribution, the data processing comprising an estimation process using a beamlet-based propagation model or a ray-based propagation model as a forward propagation model.