The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Oct. 06, 2008
Helder Lee, San Jose, CA (US);
Miriam Schwartz, Los Gatos, CA (US);
Michael Kuchar, Austin, TX (US);
Aaron Webb, Austin, TX (US);
Theodoss Costuros, Manchaca, TX (US);
Helder Lee, San Jose, CA (US);
Miriam Schwartz, Los Gatos, CA (US);
Michael Kuchar, Austin, TX (US);
Aaron Webb, Austin, TX (US);
Theodoss Costuros, Manchaca, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A cooling plate includes a channel to transmit a fluid, wherein the channel is disposed within a base and the channel has a first portion and a second portion. The first portion is disposed substantially along a peripheral edge of the base, and the second portion is coupled to the first portion and is disposed further away from the peripheral edge of the base than the first portion. The second portion has a length that is at least about 35% as long as the length of the first portion. The cooling plate also includes a lid disposed over the base and the channel, wherein the lid provides support for a substrate.