The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

Jun. 20, 2011
Applicants:

Heiko Specht, Hanau, DE;

Andreas Reisinger, Alezenau, DE;

Ulrich Hausch, Frankfurt, DE;

Frank Krueger, Nidderau, DE;

Jens Troetzschel, Neuwiedermus, DE;

Inventors:

Heiko Specht, Hanau, DE;

Andreas Reisinger, Alezenau, DE;

Ulrich Hausch, Frankfurt, DE;

Frank Krueger, Nidderau, DE;

Jens Troetzschel, Neuwiedermus, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 28/02 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
C23C 28/023 (2013.01); B81C 1/00619 (2013.01); B81C 2201/0107 (2013.01); B81C 2201/0181 (2013.01);
Abstract

One aspect is a method for the production of a three-dimensional structure of successive layers producing a multitude of successive layers wherein, with the exception of a first layer, each of the successive layers is arranged on a preceding layer. Each of the successive layers includes at least two materials wherein one material is a sacrificial material and one material is a structure material. Each of the successive layers defines a successive cross-section through the three-dimensional structure. Producing each of the layers includes depositing the sacrificial material by means of an electrochemical process and depositing the structure material by means of physical gas phase deposition. After a multitude of successive layers has been produced, the three-dimensional structure is uncovered by removing at least a part of the sacrificial material. The sacrificial material is at least one of a group consisting of nickel, silver, palladium, and gold.


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