The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2015

Filed:

May. 11, 2010
Applicants:

Alan W. Weimer, Niwot, CO (US);

Xinhua Liang, Rolla, MO (US);

Jianhua LI, Superior, CO (US);

John L. Falconer, Boulder, CO (US);

Miao Yu, Pittsford, NY (US);

Inventors:

Alan W. Weimer, Niwot, CO (US);

Xinhua Liang, Rolla, MO (US);

Jianhua Li, Superior, CO (US);

John L. Falconer, Boulder, CO (US);

Miao Yu, Pittsford, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/06 (2006.01); C23C 16/18 (2006.01); C23C 16/40 (2006.01); B01D 67/00 (2006.01); B01D 71/02 (2006.01); C23C 16/30 (2006.01); C23C 16/44 (2006.01); C23C 16/442 (2006.01); C23C 16/455 (2006.01); H01M 8/10 (2006.01);
U.S. Cl.
CPC ...
C23C 16/403 (2013.01); B01D 67/0002 (2013.01); B01D 67/0072 (2013.01); B01D 67/0079 (2013.01); B01D 71/022 (2013.01); B01D 71/024 (2013.01); B01D 71/025 (2013.01); C23C 16/30 (2013.01); C23C 16/442 (2013.01); C23C 16/4417 (2013.01); C23C 16/45525 (2013.01); C23C 16/45555 (2013.01); B01D 2325/04 (2013.01); B01D 2325/10 (2013.01); H01M 8/1016 (2013.01);
Abstract

Ultra-thin porous films are deposited on a substrate in a process that includes laying down an organic polymer, inorganic material or inorganic-organic material via an atomic layer deposition or molecular layer deposition technique, and then treating the resulting film to introduce pores. The films are characterized in having extremely small thicknesses of pores that are typically well less than 50 nm in size.


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