The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Apr. 30, 2013
Applicant:
Hewlett-packard Development Company, L.p., Houston, TX (US);
Inventors:
Danijel Gostovic, Corvallis, OR (US);
James E. Ellenson, Corvallis, OR (US);
Tracy B. Forrest, Corvallis, OR (US);
Assignee:
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81C 99/004 (2013.01);
Abstract
A temporary optical wave diffusion-promoting film is adhered to a lidded microelectromechanical systems (MEMS) wafer. Testing is performed on the lidded MEMS wafer using an interferometer directed towards the temporary optical wave diffusion-promoting film applied to the lidded MEMS wafer. The temporary optical wave diffusion-promoting film is peeled from the lidded MEMS wafer to remove the temporary optical wave diffusion-promoting film from the lidded MEMS wafer after performing the testing.