The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Nov. 30, 2012
Applicant:
Harris Corporation, Melbourne, FL (US);
Inventor:
John E. Rogers, Vero Beach, FL (US);
Assignee:
Harris Corporation, Melbourne, FL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00182 (2013.01); B81C 1/00095 (2013.01);
Abstract
A method for constructing a MEMS system includes first depositing on a surface of a substrate a first plurality of thin film layers formed of dielectric material. The first plurality of thin-film layers includes at least one conductive trace extending a distance on the substrate, parallel to the surface. A second plurality of layers is then deposited to form at least one MEMS device. The MEMS device is responsive to a control signal applied to a first input terminal and an electrical connection is formed from the conductive trace to the input terminal.