The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Jan. 22, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Biraja P. Kanungo, San Jose, CA (US);
Ren-Guan Duan, Fremont, CA (US);
Sumit Agarwal, San Jose, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 18/00 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); C04B 41/00 (2006.01); C04B 41/45 (2006.01);
U.S. Cl.
CPC ...
B32B 18/00 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); C04B 41/87 (2013.01); C04B 41/4545 (2013.01); Y10T 428/24562 (2015.01);
Abstract
To manufacture a ceramic article, a ceramic body comprising AlOis roughened to a roughness of approximately 140 micro-inches (μin) to 240 μin. The ceramic body is subsequently cleaned and then coated with a ceramic coating. The ceramic coating comprises a compound of YAlO(YAM) and a solid solution of Y-xZrO. The ceramic coating is then polished.