The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Sep. 05, 2013
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Yoji Kitano, Chino, JP;
Norio Okuyama, Suwa, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/053 (2006.01); H05K 5/02 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
H05K 5/0217 (2013.01); B81B 7/0041 (2013.01); B81B 2201/0285 (2013.01); B81B 2203/0118 (2013.01); B81C 2203/0136 (2013.01); B81C 2203/0145 (2013.01); B81C 2203/0163 (2013.01); H01L 23/053 (2013.01); Y10T 29/49002 (2015.01);
Abstract
An electronic device includes a substrate, a cavity part formed above the substrate with a functional device placed therein, a coating structure that defines the cavity part, and the coating structure has a first surrounding wall formed around the cavity part above the substrate, a second surrounding wall formed around the cavity part above the first surrounding wall, a coating layer that defines an upper surface of the cavity part, wherein the second surrounding wall is located inside the first surrounding wall in a plan view.