The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Feb. 14, 2013
Yao-hung Yang, Santa Clara, CA (US);
Jeonghoon OH, San Jose, CA (US);
Frank F. Hooshdaran, Pleasanton, CA (US);
Tom K. Cho, Los Altos, CA (US);
Tao Hou, Palo Alto, CA (US);
Yao-Hung Yang, Santa Clara, CA (US);
Jeonghoon Oh, San Jose, CA (US);
Frank F. Hooshdaran, Pleasanton, CA (US);
Tom K. Cho, Los Altos, CA (US);
Tao Hou, Palo Alto, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber.