The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Apr. 19, 2011
Applicants:
Martin Humphry, Sheffield, GB;
Andrew Maiden, Sheffield, GB;
Inventors:
Martin Humphry, Sheffield, GB;
Andrew Maiden, Sheffield, GB;
Assignee:
PHASE FOCUS LIMITED, Sheffield, South Yorkshire, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); H01J 37/22 (2006.01); G01B 11/24 (2006.01); G01B 11/30 (2006.01); G01N 23/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01B 11/24 (2013.01); G01B 11/303 (2013.01); G01N 23/043 (2013.01); H01J 2237/226 (2013.01); H01J 2237/2614 (2013.01);
Abstract
Embodiments of the present invention provide a method of determining at least one characteristic of a target surface, comprising providing a phase map for a first region of a target surface via radiation having a first wavelength, providing n further phase maps for the first region via radiation having a further n wavelengths each different from the first wavelength, and determining at least one characteristic at the target surface responsive to the first and further phase maps.