The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Aug. 30, 2012
Applicants:
Yuuki Suka, Joetsu, JP;
Koji Hasegawa, Joetsu, JP;
Yuji Harada, Joetsu, JP;
Inventors:
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/11 (2006.01); C08K 5/04 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08K 5/04 (2013.01); G03F 7/0046 (2013.01); G03F 7/2041 (2013.01);
Abstract
A protective film-forming composition comprising a polymer comprising fluorinated alcohol units of the structure: —C(CF)ORwherein Ris H or a monovalent hydrocarbon group and having a Mw of 1,000-500,000 is applied onto a resist film to form a protective film thereon. The protective film-forming composition has high water repellent and water slip performance. The protective film exhibits barrier properties to water and prevents any resist components from being leached out in water.