The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Oct. 14, 2011
Manabu Komatsu, Yokohama, JP;
Manabu Komatsu, Yokohama, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
There is provided a profile measuring apparatus which measures a profile of an object including: a projection unit which projects a pattern on the object from a projection direction; a measurement unit, which is displaced at a difference position for the projection unit and takes an image of the pattern from a direction different from the projection direction to measure a position on a surface of the object based on an image data obtained with the taken image; an object-rotation unit which rotates the object in two directions; and a pattern-rotation unit which is connected to the projection unit so as to be able to rotate the pattern relative to the object-rotation unit.