The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Jul. 15, 2009
Applicants:
Nicolas Blasco, Grenoble, FR;
Anthony Correia-anacleto, Maisons-Alfort, FR;
Audrey Pinchart, Antony, FR;
Andreas Zauner, Voisins le Bretonneux, FR;
Ziyun Wang, Newark, DE (US);
Inventors:
Nicolas Blasco, Grenoble, FR;
Anthony Correia-Anacleto, Maisons-Alfort, FR;
Audrey Pinchart, Antony, FR;
Andreas Zauner, Voisins le Bretonneux, FR;
Ziyun Wang, Newark, DE (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01); C23C 16/455 (2006.01); C23C 16/18 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/18 (2013.01);
Abstract
A method for forming a tantalum-containing layer on a substrate, the method comprising at least the steps of: wherein: