The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
May. 12, 2009
Applicants:
Jeffrey Birkmeyer, San Jose, CA (US);
Youming LI, San Jose, CA (US);
Inventors:
Jeffrey Birkmeyer, San Jose, CA (US);
Youming Li, San Jose, CA (US);
Assignee:
FUJIFILM Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/12 (2006.01); B41J 2/16 (2006.01); H01L 21/311 (2006.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1632 (2013.01); B41J 2/1646 (2013.01); H01L 21/31138 (2013.01); H01L 41/332 (2013.01); Y10T 428/24802 (2015.01); Y10T 428/24917 (2015.01);
Abstract
Piezoelectric material is shaped by plasma etching to form deep features with high aspect ratios, and desired geometries.