The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2015

Filed:

Apr. 10, 2013
Applicant:

Jenoptik Automatisierungstechnik Gmbh, Jena, DE;

Inventors:

Sebastian Nawrodt, Jena, DE;

Ronny Ullmann, Rothenstein, DE;

Karsten Heinig, Gera, DE;

Christian Matthies, Camburg, DE;

Juergen Weisser, Jena, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); B23K 26/08 (2014.01); C03B 33/09 (2006.01); H01L 21/78 (2006.01); B23K 26/36 (2014.01); B23K 26/073 (2006.01); C03B 33/10 (2006.01); B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
B23K 26/367 (2013.01); B23K 26/0042 (2013.01); B23K 26/0057 (2013.01); B23K 26/0087 (2013.01); B23K 26/06 (2013.01); B23K 26/0656 (2013.01); B23K 26/0736 (2013.01); B23K 26/0738 (2013.01); B23K 26/08 (2013.01); B23K 26/365 (2013.01); C03B 33/09 (2013.01); C03B 33/091 (2013.01); C03B 33/102 (2013.01); H01L 21/78 (2013.01);
Abstract

The invention is directed to an apparatus and a method for generating separating fissures in a substrate through action of a laser beam having an elliptical beam cross section with a beam spot length in a movement direction along a separating fissure to be generated in the substrate. The apparatus and method are particularly suitable for separating fissures which start or end on the substrate surface. A suitable diaphragm prevents radiation from impinging on the substrate before the start and after the end of the fissure.


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