The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Nov. 16, 2011
Applicant:
Yoko Kanemoto, Fujimi, JP;
Inventor:
Yoko Kanemoto, Fujimi, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H03H 9/24 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/2457 (2013.01); B81B 3/0013 (2013.01); B81C 1/00968 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0118 (2013.01); H03H 2009/02511 (2013.01);
Abstract
A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.