The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2015

Filed:

Aug. 12, 2011
Applicants:

Dariusz Burak, Fort Collins, CO (US);

Stefan Bader, Fort Collins, CO (US);

Alexandre Shirakawa, San Jose, CA (US);

Phil Nikkel, Loveland, CO (US);

Inventors:

Dariusz Burak, Fort Collins, CO (US);

Stefan Bader, Fort Collins, CO (US);

Alexandre Shirakawa, San Jose, CA (US);

Phil Nikkel, Loveland, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/54 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/58 (2006.01); H03H 9/17 (2006.01); H03H 3/04 (2006.01);
U.S. Cl.
CPC ...
H03H 9/0211 (2013.01); H03H 9/132 (2013.01); H03H 9/585 (2013.01); H03H 9/587 (2013.01); H03H 9/589 (2013.01); H03H 3/04 (2013.01); H03H 9/02007 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01);
Abstract

In a representative embodiment, a bulk acoustic wave (BAW) resonator comprises: a cavity provided in a first layer and having a perimeter bordering an active region of the BAW resonator, a distributed Bragg reflector (DBR) bordering the cavity, wherein the first layer is one of the layers of the DBR; a first electrode disposed over the substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer; a second piezoelectric layer disposed over the second electrode; a third electrode disposed over the second piezoelectric layer; and a bridge disposed between the first electrode and the third electrode.


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