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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9082978 B1

PDFFull Text
Date of Patent:
Jul. 14, 2015

Filed:

Sep. 17, 2013

Piezoelectric film and method of manufacturing the piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element

Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Yoshiaki Tanaka, Nara, JP;

Takakiyo Harigai, Osaka, JP;

Hideaki Adachi, Osaka, JP;

Eiji Fujii, Osaka, JP;

Assignee:

PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka, JP;

Attorney:

McDermott Will & Emery LLP

Primary Examiner:

Matthew Luu

Assistant Examiner:

Patrick King

Int. Cl.
CPC ...
B41J 2/045 (2006.01); H02N 2/00 (2006.01); H01L 41/187 (2006.01); C30B 29/32 (2006.01); G01C 19/5628 (2012.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01); G01C 19/5621 (2012.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01); H01L 41/316 (2013.01); G01C 19/56 (2012.01); H02N 2/18 (2006.01); C30B 23/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1878 (2013.01); B41J 2/14201 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); C30B 23/02 (2013.01); C30B 29/32 (2013.01); G01C 19/56 (2013.01); G01C 19/5621 (2013.01); G01C 19/5628 (2013.01); H01L 41/0477 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/1136 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01); H02N 2/18 (2013.01); B41J 2202/03 (2013.01);
Abstract

In order to provide a non-lead piezoelectric film having high crystalline orientation, low dielectric loss, high polarization-disappear temperature, and high piezoelectric constant, the present invention is a piezoelectric film comprising: a NaMlayerhaving a (001) orientation only; and a (1-α) (Bi, Na, Ba) TiO-αBiQOlayerhaving a (001) orientation only. The (1-α) (Bi, Na, Ba) TiO-αBiQOlayeris formed on the NaMlayer. M represents Pt, Ir, or PtIr. Q represents Fe, Co, ZnTi, or MgTi. x represents a value of not less than 0.002 and not more than 0.02. α represents a value of not less than 0.20 and not more than 0.50.

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