The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Jul. 09, 2012
Vijay K. Kapur, Tarzana, CA (US);
Joel Haber, Pasadena, CA (US);
Vincent Kapur, Tarzana, CA (US);
Ashish Bansal, Porter Ranch, CA (US);
Dan Guevarra, Norwalk, CA (US);
Vijay K. Kapur, Tarzana, CA (US);
Joel Haber, Pasadena, CA (US);
Vincent Kapur, Tarzana, CA (US);
Ashish Bansal, Porter Ranch, CA (US);
Dan Guevarra, Norwalk, CA (US);
International Solar Electric Technology, Inc., Tarzana, CA (US);
Abstract
Described herein are systems and methods method for forming semiconductor films. In some embodiment, the methods comprising depositing the source solution containing a solvent and plurality of types of metal ionic species and a second type on a substrate heated to a temperature at or above the boiling point of the solvent. In some embodiments, methods and apparatus for exposing a substrate to a gas are also provided.