The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2015

Filed:

Aug. 15, 2012
Applicants:

Oleg Victor Kolosov, Lancaster, GB;

Ilja Grishin, Lancaster, GB;

Inventors:

Oleg Victor Kolosov, Lancaster, GB;

Ilja Grishin, Lancaster, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/46 (2006.01); H01J 37/305 (2006.01); G01N 1/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3053 (2013.01); G01N 1/32 (2013.01); H01J 2237/20 (2013.01);
Abstract

A method for forming a polished facet between an edge and a face of a sample, involves removing a first portion of the sample by directing an ion beam onto the edge adjacent the first portion along an ion beam axis to leave the polished facet. The ion beam axis lies on an ion beam plane oriented at a glancing incident angle, preferably from 1° to 30°, to a sample plane defined by and parallel to the first face. The ion beam is directed to flow from the edge towards the first face. Also disclosed is a sample preparation apparatus comprising a chamber adapted for evacuation with a sample holder adapted to hold a sample comprising a first face bounded by an edge, and an ion gun arranged to direct an ion beam along an ion beam axis towards the sample.


Find Patent Forward Citations

Loading…