The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Aug. 14, 2014
Applicant:
Shimadzu Corporation, Kyoto-shi, Kyoto, JP;
Inventor:
Shin Fujita, Kyoto, JP;
Assignee:
SHIMADZU CORPORATION, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/18 (2006.01); H01J 3/14 (2006.01);
U.S. Cl.
CPC ...
H01J 3/14 (2013.01);
Abstract
An electron beam device including an electron source which generates an electron beam; three lenses for controlling the characteristics of the electron beam, including a first lens, second lens and third lens arranged in sequence from the upstream side in relation to the emission direction of the electron beam; and a beam definition aperture arranged on the second lens. The position of the second lens is adjusted such that the total lens magnification ratio obtained under maximum beam current substantially matches the ideal lens magnification ratio defined on the basis of electro-optical characteristics.