The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2015

Filed:

Aug. 19, 2009
Applicants:

Toyohiko Yamauchi, Hamamatsu, JP;

Hidenao Iwai, Hamamatsu, JP;

Inventors:

Toyohiko Yamauchi, Hamamatsu, JP;

Hidenao Iwai, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 11/24 (2006.01); G01N 21/45 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2441 (2013.01); G01N 21/45 (2013.01);
Abstract

The observation deviceis to observe the surface or the inside of an observation object, that has light sourcesand, lensesto, an aperture, an optical multiplexer, an optical demultiplexer, a half mirror, an image pickup unit, an analyzing unit, a display unit, a light receiving unit, a displacement detecting unit, a piezoelectric actuator, a drive unit, a mirror, a stage, a drive unit, and a control unit. The analyzing unitdetermines a complex amplitude of an interference light figure taken as an image by the image pickup unitwith a phase shift technique after an optical path difference is set to each target value in sequence, and determines an amount of change per certain time of a phase component of a reflected light generated on the surface or the inside of the observation object 9 on the basis of an absolute value of an amount of change per certain time of the determined complex amplitude and an absolute value of the complex amplitude.


Find Patent Forward Citations

Loading…