The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Sep. 29, 2008
Applicant:
Alexander Behres, Pfatter, DE;
Inventor:
Alexander Behres, Pfatter, DE;
Assignee:
OSRAM Opto Semiconductors GmbH, Regensburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/54 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 14/50 (2006.01); C23C 16/30 (2006.01); C30B 25/08 (2006.01); C30B 25/12 (2006.01); C30B 25/14 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45551 (2013.01); C23C 14/505 (2013.01); C23C 16/301 (2013.01); C23C 16/306 (2013.01); C23C 16/4584 (2013.01); C30B 25/08 (2013.01); C30B 25/12 (2013.01); C30B 25/14 (2013.01);
Abstract
A layer depositing device comprises a chamber () having a substrate carrier () for receiving at least one substrate () to be coated, and a process gas space (), comprising a partition () that separates a first segment () of the process gas space () from a second segment () of the process gas space (). The layer depositing device has a device () for moving the substrate () relative to the partition ().