The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
May. 31, 2012
Seung Kook RO, Daejeon, KR;
Jong-kweon Park, Daejeon, KR;
Byung-sub Kim, Daejeon, KR;
Sung Cheul Lee, Daejeon, KR;
Seung Kook Ro, Daejeon, KR;
Jong-Kweon Park, Daejeon, KR;
Byung-Sub Kim, Daejeon, KR;
Sung Cheul Lee, Daejeon, KR;
KOREA INSTITUTE OF MACHINERY & MATERIALS, Daejeon, KR;
Abstract
Disclosed are an actively compensated stage including: a guide support having first and second guide surfaces perpendicular to each other; a table having first and second sides opposite the first and second guide surfaces and having air bearings on the first and second sides; a driving linear motor moving the table straight in an x-axial direction; and a plurality of magnetic actuators applying a magnetic preload between the guide support and the table and changing a magnetic force between the guide support and the table to compensate for 5-DOF motion errors generated in the table.