The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Oct. 29, 2012
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Izya Kremerman, Los Gatos, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Damon Keith Cox, Round Rock, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 9/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/044 (2013.01); B25J 9/043 (2013.01); H01L 21/67754 (2013.01);
Abstract
Substrate transport systems and robot apparatus are provided. The systems are adapted to pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are provided, as are numerous other aspects.