The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Apr. 24, 2007
Applicant:
Christian L. Petersen, Burnaby, CA;
Inventor:
Christian L. Petersen, Burnaby, CA;
Assignee:
Capres, Lyngby, DK;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01); G01R 31/312 (2006.01); G01R 31/26 (2014.01);
U.S. Cl.
CPC ...
G01R 31/312 (2013.01); G01R 31/2648 (2013.01);
Abstract
A method for accurately determining the sheet resistance and leakage current density of a shallow implant in a semiconductor substrate surface includes making one or more four-point resistance measurements with an induced current below 100 μA on the semiconductor surface with a plurality of electrode spacing sets, at least one set defining an electrode separation distance less than 100 μm. The sheet resistance and implant leakage are determined through fitting the measured data to theoretical data to within a predetermined error margin.