The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2015

Filed:

Nov. 21, 2012
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Hiroyuki Muto, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01);
U.S. Cl.
CPC ...
G01J 3/28 (2013.01);
Abstract

The present invention enables high-speed and high-precision correction of a ghost detected in a spectrum measuring apparatus. A ghost is detected from spectrum data of reference light measured by the apparatus, and for each wavelength of input light, a light amount ratio α of the input light to the corresponding ghost, as well as a shift amount di indicative of a wavelength difference between the input light and the corresponding ghost are acquired. For each spectrum wavelength of the measured light, wavelength shifting for the corresponding shift amount di and multiplication of the light amount ratio (or intensity ratio) α are performed for estimating the ghost. By removing the estimated ghost from the measured light, it is possible to realize high-precision ghost correction with a reduced amount of calculation and a reduced amount of memory.


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