The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2015

Filed:

Sep. 14, 2012
Applicant:

Hideaki Tamiya, Kanagawa, JP;

Inventor:

Hideaki Tamiya, Kanagawa, JP;

Assignee:

DMG MORI SEIKI CO., LTD., Yamatokoriyama-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02015 (2013.01); G01B 9/02018 (2013.01); G01B 9/02022 (2013.01); G01B 2290/70 (2013.01); G01B 9/02081 (2013.01);
Abstract

A displacement detecting device includes a light source, a beam splitting section, a diffraction grating, a reflecting section, a beam combining section, a light receiving section, and a relative position information output section. The diffraction grating is adapted to diffract a first beam reflected by a surface-to-be-measured of a member-to-be-measured, and cause the diffracted first beam to be incident again on the surface-to-be-measured. The reflecting section is adapted to reflect a second beam split by the beam splitting section to the beam splitting section. The light receiving section is adapted to receive interfering light of the first beam and the second beam. The relative position information output section is adapted to output displacement information of the surface-to-be-measured in the height direction based on intensity of the received interfering light.


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