The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Feb. 12, 2013
Seiko Epson Corporation, Tokyo, JP;
Masami Maeda, Suwa, JP;
Toshioki Shimojima, Suwa, JP;
Seiko Epson Corporation, , JP;
Abstract
A handler includes a storage tank which stores liquid nitrogen, supply channels which supply refrigerant from the storage tank to inner passages of a first shuttle, a valve which opens and closes the supply channel, and a heat exchanger which has vaporization chambers with larger flow path cross-sectional areas than those of the supply channels to vaporize liquid nitrogen within the vaporization chambers. According to this structure, the respective vaporization chambers are filled with nitrogen gas produced by preceding vaporization. Thus, pressure fluctuations produced by successive vaporization of liquid nitrogen can be reduced. Moreover, nitrogen gas is supplied to the respective inner passages. Accordingly, excessive cooling for part housing pockets can be prevented.