The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2015

Filed:

Mar. 15, 2013
Applicant:

Raytheon Company, Waltham, MA (US);

Inventors:

James R. Chow, San Gabriel, CA (US);

Carl W. Townsend, Los Angeles, CA (US);

Assignee:

RAYTHEON COMPANY, Waltham, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F 3/14 (2006.01); C01B 31/02 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C25F 3/14 (2013.01); C01B 31/0253 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/32134 (2013.01);
Abstract

A method for etching Carbon Nanotube (CNT) sheet material for electrical circuit and thin film thermal structures. The method includes: forming an mask on a sheet of electrically conductive CNT material; and electrochemically removing unmasked portions of the CNT material.


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