The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Aug. 24, 2009
Jan Arnaud Janssens, Deventer, NL;
Gerard Cornelis Van Den Eijkel, Losser, NL;
Jan Matthijn Dekkers, Aadorp, NL;
Joska Johannes Broekmaat, Enschede, NL;
Paul Te Riele, The Hague, NL;
Jan Arnaud Janssens, Deventer, NL;
Gerard Cornelis Van Den Eijkel, Losser, NL;
Jan Matthijn Dekkers, Aadorp, NL;
Joska Johannes Broekmaat, Enschede, NL;
Paul Te Riele, The Hague, NL;
Solmates B.V., Enschede, NL;
Abstract
The invention relates to a method for depositing a material for a target onto a surface of a sample, which method comprises the steps of: irradiating a surface of the target with a laser or electron beam to generate a plume of target material particles; positioning the sample near the plume, such that the target material particles are deposited onto the surface of the sample; rotating the sample around a rotation axis being perpendicular to the surface of the sample onto which the particles are deposited; moving the laser beam along the surface of the target, such that the plume moves in a radial direction in relation to the rotation axis; pulsing the laser beam at a variable frequency.