The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Dec. 29, 2010
Hiroshi Takai, Tokyo, JP;
Yuichi Nakayoshi, Tokyo, JP;
Hiroshi Takai, Tokyo, JP;
Yuichi Nakayoshi, Tokyo, JP;
SUMCO Corporation, Tokyo, JP;
Abstract
A polishing pad shape measured by a polishing pad shape measuring apparatus is modified into a target shape of a polishing pad by using a dressing tool so that a wafer has a desired surface shape. The invention is a method for shape modification of a polishing padfor polishing a workpiece into a desired surface shape, comprising: a measurement step Sof measuring a polishing pad shape in a state of being attached to a plateby using a polishing pad shape measuring apparatus; a condition determination step Sof selecting a dressing recipe capable of polishing the workpiece into a desired surface shape from a plurality of pre-provided dressing recipes based on the measurement result in the measurement step S; and a shape modification step Sof dressing the polishing padby using the dressing recipe determined in the condition determination step S