The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Dec. 17, 2012
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;

Inventors:

Sangwon Shin, Yongin-si, KR;

Hyunju Kang, Pocheon-si, KR;

Sangwoo Sohn, Yongin-si, KR;

Sukyoung Yang, Chuncheon-si, KR;

Changoh Jeong, Suwon-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/34 (2006.01); H01L 29/66 (2006.01); H01L 21/324 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66742 (2013.01); H01L 21/324 (2013.01); H01L 21/67109 (2013.01); H01L 21/67201 (2013.01); H01L 21/67745 (2013.01); H01L 27/1262 (2013.01);
Abstract

Provided is a method for fabricating an array substrate. The method for fabricating the array substrate includes forming a semiconductor layer on a substrate, forming a gate electrode which is insulated from the semiconductor layer, forming source and drain electrodes which are insulated from the gate electrode and connected to the semiconductor layer, and forming a pixel electrode connected to the drain electrode. Here, at least one of the forming of the gate electrode, the forming of the source and drain electrodes, and the forming of the pixel electrode includes forming a conductive layer on the substrate, cooling the substrate on which the conductive layer is formed to a temperature of no greater than about 0° C., heating the cooled substrate, and patterning the conductive layer.


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