The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Feb. 14, 2013
Applicant:

Boris Kobrin, Dublin, CA (US);

Inventor:

Boris Kobrin, Dublin, CA (US);

Assignee:

Rolith, Inc., Pleasanton, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/24 (2006.01); G03F 1/00 (2012.01); G03F 7/00 (2006.01); G03F 1/92 (2012.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 1/00 (2013.01); G03F 7/0002 (2013.01); G03F 1/92 (2013.01); G03F 7/24 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01);
Abstract

Methods for fabricating nanopatterned cylindrical photomasks are disclosed. A master pattern having nanometer scale features may be formed on a master substrate. A layer of an elastomer material may be formed on a surface of a transparent cylinder. The master pattern may be transferred from the master to the layer of elastomer material on the surface of the transparent cylinder. Alternatively, a nanopatterned cylindrical photomask may be fabricated by forming a pattern having nanometer scale features on an elastomer substrate and laminating the patterned elastomer substrate to a surface of a cylinder. In another method, a layer of elastomer material may be formed on a surface of a transparent cylinder and a pattern having nanometer scale features may be formed on the elastomer material by a direct patterning process.


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