The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Oct. 29, 2010
Applicants:

Iichiro Inoue, Osaka, JP;

Koichi Miyachi, Osaka, JP;

Inventors:

Iichiro Inoue, Osaka, JP;

Koichi Miyachi, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1337 (2006.01); G03F 1/50 (2012.01); G02F 1/13 (2006.01);
U.S. Cl.
CPC ...
G02F 1/133788 (2013.01); G02F 1/1303 (2013.01); G03F 1/50 (2013.01);
Abstract

This invention is an exposure apparatus for exposing a photoalignment film provided on a substrate. The exposure apparatus includes a light source and a photomask, and exposes the photoalignment film through the photomask while scanning the light source or the substrate. When a direction in which the light source or the substrate is scanned is taken as a scanning direction, and a direction that is orthogonal to the scanning direction is taken as a vertical direction, the photomask includes a first region and a second region that is adjacent to the first region in the vertical direction. The first region includes a plurality of first transparent portions inside a first light-shielding portion. The plurality of first transparent portions are arranged in the vertical direction. The second region includes a plurality of second transparent portions inside a second light-shielding portion.


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