The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2015
Filed:
Nov. 22, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Oichi Kubota, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A measuring apparatus to identify a material and thickness of each of a plurality of layers included in a layered body, based on a measurement result obtained by measuring a time domain waveform of an electromagnetic wave pulse from the layered body, includes a database configured to store data of a plurality of material candidates and a plurality of thickness candidates, an input unit configured to input a search range of the data stored in the database, and a processing unit configured to reproduce a time domain waveform of an electromagnetic wave pulse from the layered body by employing data of a plurality of material candidates and a plurality of thickness candidates within the search range, and to compare this reproduced time domain waveform and the time domain waveform of the measurement result, thereby identifying the material and thickness of each of the plurality of layers.