The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2015
Filed:
Jul. 16, 2010
Toshiyuki Kimura, Tokyo, JP;
Toshiyuki Kimura, Tokyo, JP;
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Abstract
A controller performs, while controlling a first stage cryopanel to have a target temperature: a first determination in which it is determined whether a second stage cryopanel has been heated to a temperature higher than or equal to an alert temperature set to be lower than a maximum temperature of the second stage cryopanel set in the vacuum apparatus; and a second determination in which it is determined whether the second stage cryopanel is continuously being heated, for a preset period of time or longer, to a temperature within a temperature range set on condition that the alert temperature is a maximum. The controller may perform, while controlling the first stage cryopanel to have a target temperature, a third determination in which it is determined whether a state where an error between the temperature of the second stage cryopump during a pumping operation and the minimum attained temperature thereof measured in the initial stage of an operation of the cryopump occurs, has been continued for a continued period of time or longer, the continued period of time being set to be longer than the preset period of time.