The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2015
Filed:
Dec. 25, 2012
Applicant:
Adeka Corporation, Tokyo, JP;
Inventors:
Yuta Taguchi, Tokyo, JP;
Kouta Saitoh, Tokyo, JP;
Assignee:
Adeka Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C23F 1/18 (2006.01); C23F 1/16 (2006.01); H01L 31/0224 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C23F 1/18 (2013.01); C23F 1/16 (2013.01); H01L 21/32134 (2013.01); H01L 31/022425 (2013.01); Y02E 10/50 (2013.01);
Abstract
The etching liquid composition of the present invention contains a ferric ion component; a hydrogen chloride component; and a component that is at least one type of compound selected from the group consisting of a compound represented by general formula (1) below and a straight chain or branched chain alcohol having 1 to 4 carbon atoms: wherein Rand Rare each independently a hydrogen atom or a straight chain or branched chain alkyl group having 1 to 4 carbon atoms, Ris a straight chain or branched chain alkylene group having 1 to 4 carbon atoms, and n is a number between 1 and 3.