The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2015
Filed:
Feb. 24, 2010
Applicants:
Reese Reynolds, Sonora, CA (US);
H. William Lucas, Jr., Watsonville, CA (US);
Tyke Johnson, Sonora, CA (US);
Inventors:
Reese Reynolds, Sonora, CA (US);
H. William Lucas, Jr., Watsonville, CA (US);
Tyke Johnson, Sonora, CA (US);
Assignee:
Sandvik Thermal Process, Inc., Sonora, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); H01L 21/306 (2006.01); C23F 1/00 (2006.01); C23C 16/44 (2006.01); H01L 31/18 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45578 (2013.01); C23C 16/45546 (2013.01); C23C 16/45548 (2013.01); C23C 16/4412 (2013.01); H01L 31/1876 (2013.01); Y02E 10/50 (2013.01);
Abstract
The present invention relates to equipment used to manufacture PV cells or modules. In some embodiments, a gas delivery and gas exhaust system are provided for processing a plurality of substrates. The gas delivery and gas exhaust system are designed such that the substrates are exposed in a uniform manner to the gas.