The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Jun. 03, 2010
Applicants:

Masaaki Tanabe, Okayama, JP;

Hideo Hirata, Okayama, JP;

Mitsunori Oda, Okayama, JP;

Inventors:

Masaaki Tanabe, Okayama, JP;

Hideo Hirata, Okayama, JP;

Mitsunori Oda, Okayama, JP;

Assignee:

TAZMO CO, LTD., Okayama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/02 (2006.01); B05C 13/02 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B05C 5/02 (2006.01);
U.S. Cl.
CPC ...
B05C 13/02 (2013.01); B05C 5/0208 (2013.01); B05C 5/0216 (2013.01); B05C 5/0283 (2013.01); B05C 5/0254 (2013.01); H01L 21/6715 (2013.01); H01L 21/6776 (2013.01);
Abstract

A substrate coating device () includes a precision stage (), a nozzle (), and conveyors (toand). The precision stage () has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (toand) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage () in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor () is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.


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