The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Nov. 16, 2012
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Junichiro Kozaki, Kyoto, JP;

Yoshihiro Nagano, Kyoto, JP;

Masaki Ofuji, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 7/09 (2006.01); F16C 32/04 (2006.01); F04D 19/04 (2006.01); F04D 29/058 (2006.01);
U.S. Cl.
CPC ...
H02K 7/09 (2013.01); F04D 19/04 (2013.01); F16C 32/0444 (2013.01); F04D 29/058 (2013.01);
Abstract

A magnetic levitation type vacuum pump includes an electromagnet magnetically levitating a rotor by a magnetic force, an electromagnet driving circuit supplying an electromagnet current including a magnetic levitation control current component and a carrier wave current component having a frequency band higher than the magnetic levitation control current component to the electromagnet coil, a levitated position detecting circuit detecting the carrier wave current component and generating a levitated position signal of the rotor, a magnetic levitation control circuit inputting a current command of the magnetic levitation control current component to the electromagnet driving circuit based on the levitated position signal. The electromagnet coil has a primary coil and a secondary coil connected in parallel with the primary coil. An interrupting circuit connected in series with the secondary coil for the carrier wave current component passing therethrough and interrupting the magnetic levitation control current component is further included.


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