The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Jan. 03, 2013
Applicant:

Daifuku Co., Ltd., Osaka-shi, JP;

Inventors:

Takeshi Shin, Gamo-gun, JP;

Masahiro Takahara, Gamo-gun, JP;

Toshihito Ueda, Gamo-gun, JP;

Assignee:

Daifuku Co., Ltd., Osaka-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01); H01L 21/67393 (2013.01); H01L 21/67769 (2013.01);
Abstract

An inactive gas introducing facility includes an introducing device for introducing inactive gas to the inside of a container stored in a storage section of a storage shelf with discharging gas present inside the container to the inside of a storage space partitioned from the outside and a controller for controlling operation of the introducing device. In a normal stop mode, the controller controls the operation of the introducing device to stop feeding of inactive gas to the container in response to detection of an opened state of an inspection door. And, in a stop nullification mode, the controller controls the operation of the introducing device to continue feeding of inactive gas to the container even in response to detection of the opened state of the inspection door.


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