The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Apr. 16, 2012
Johannes Krijne, Best, NL;
Jürgen Eser, Titz, DE;
Johannes Krijne, Best, NL;
Jürgen Eser, Titz, DE;
KONINKLIJKE PHILIPS N.V., Eindhoven, NL;
Abstract
In vapor deposition applications, especially OLED mass production, where it is necessary to measure and/or control the deposition rate of evaporation sources within specific tolerances, a measurement system is adapted to use robust and accurate optical thickness measurement methods at high and low rate sources, so that the thickness of a layer deposited on a substrate can be measured and controlled. A first evaporation source () deposits a layer of material on a substrate (). A mobile element () is provided, On which a film is deposited from a second evaporation source () in a deposition location (D). Subsequently the mobile element is conveyed to a measurement location (D) where the thickness of the film is measured by a thickness detector (). The measurement apparatus is arranged to control the deposition of the first evaporation source in dependence on the thickness of the film deposited on the mobile element.