The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Jun. 09, 2011
Applicants:

Masaru Senoo, Okazaki, JP;

Tomoo Yamabuki, Nagoya, JP;

Inventors:

Masaru Senoo, Okazaki, JP;

Tomoo Yamabuki, Nagoya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/43 (2006.01); H01L 21/332 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/32 (2006.01); H01L 29/739 (2006.01); H01L 29/861 (2006.01); H01L 21/22 (2006.01); H01L 27/06 (2006.01); H01L 29/10 (2006.01); H01L 29/66 (2006.01); H01L 27/07 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0615 (2013.01); H01L 29/0834 (2013.01); H01L 29/32 (2013.01); H01L 29/7397 (2013.01); H01L 29/861 (2013.01); H01L 21/221 (2013.01); H01L 27/0664 (2013.01); H01L 29/0684 (2013.01); H01L 29/1095 (2013.01); H01L 29/66348 (2013.01); H01L 27/0761 (2013.01);
Abstract

A method for fabricating a semiconductor device in which a lifetime control region can be formed within a predetermined range with high positioning accuracy is provided. In a semiconductor device, an IGBT element region and a diode element region may be formed in one semiconductor substrate. The IGBT element region may include a second conductivity type drift layer and a first conductivity type body layer. The diode element region may include a second conductivity type drift layer and a first conductivity type anode layer. A concentration of heavy metal included in the drift layer of the diode element region may be set higher than a concentration of the heavy metal included in the drift layer of the IGBT element region.


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